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Silicon Tetrafluoride

SiF4

Grade

Electronic

VLSI

-

Critical Assay

99.99%

99.999%

-

Nitrogen

<50ppm

<3ppm

N2

Argon+Oxygen

<20ppm

<1ppm

Ar+O2

Carbon Dioxide

<10ppm

<1ppm

CO2

Total Hydrocarbons(as CH4)

<10ppm

<10ppm

THC

Carbon Dioxide

<10ppm

<0.5ppm

CO

Arsenic,Boron,Phosphorous

-

<0.5ppm

As,P,B

Nitrogen Trifluoride

NF3

Grade

Electronic

VLSI

-

Critical Assay

99.9%

99.99%

-

Tetrafluoromethane

<100ppmw

<50ppmw

CF4

Nitrogen

<50ppmw

<2ppmw

N2

Oxygen+Argon

<50ppmw

<2.5ppmw

O2+Ar

Carbon Dioxide

<10ppmw

<2ppmw

CO2

Water

<1ppmv

<0.25ppmv

H2O

Hydrogen Fluoride

<0.3ppmw

<1.5ppmw

HF

Sulfur Hexafluoride

<50ppmw

<20ppmw

SF6

Nitrous Oxide

<10ppmw

<3ppmw

N2O

Carbon Monoxide

<10ppmw

-

CO

Halocarbon 14 (Tetrafluromethane)

CF4

Grade

Electronic

VLSI

-

Critical Assay

99.99%

99.997%

-

Meets SEMI Specification

SEMI C3.21-90

SEMI C3.21-90

Nitrogen

<200ppm

<16ppm

N2

Oxygen

<50ppm

<4ppm

O2+Ar

Carbon Dioxide

<5ppm

<1ppm

CO2

Water

<1ppm

<1ppm

H2O

Carbon Monoxide

<5ppm

<1ppm

CO

Acidity as HF

<0.1ppmw

<0.1ppmw

H+

Sulfur Hexafluoride

<1ppm

<1ppm

SF6

Other Halocarbons

<10ppm

<2ppm

Tungsten Hexafluoride

WF6

Grade

Electronic

VLSI

-

Critical Assay

99.9%

99.998%

-

Nitrogen

<50ppm

<10ppm

N2

Oxygen+Argon

-

<1ppm

O2+Ar

Carbon Dioxide

<5ppm

<1ppm

CO2

Carbon Monoxide

<5ppm

<1ppm

CO

Carbon Tetrafluoride

<10ppm

<1ppm

CF4

Hydrogen Fluoride

<200ppm

<10ppm

HF

Silicon Tetrafluoride

<10ppm

<0.5ppmw

SiO4

Sulfur Hexafluoride

<10ppm

<0.5ppm

SF6

Boron Trifluoride

BF3

Grade

Electronic

VLSI

-

Critical Assay

99.9%

99.99%

-

Nitrogen

<15ppm

N2

Oxygen

<5ppm

O2

Silicon Tetrfluoride

<20ppm

SiO4

Sulfur Dioxide

<20ppm

SO2

Total Sulfates

<8ppm

SO4

Halocarbon c-318 (Octafluorocyclobutane)

C4F8

Critical Assay

99.9%

99.999%

-

Nitrogen

<200ppm

<5ppm

N2

Oxygen

<500ppm

<1ppm

O2

Water

<10ppm

<2ppm

H2O

Tetrafluoromethane

-

<1ppm

CF4

Cyanogen(C2N2)

Purity

98% min

Moisture

100 ppm max

HCN

0.3%

CO2

<1.5%

Non-condensable Gases in Vapor Phase

1.5% max.

Vinyl Chloride Monomer(VCM)

3ppm max.

Carbonyl Sulfide(COS)

Purity

99% min

Moisture

0.2%

H2S

0.5%

CO2

0.5%

CO

1%

Air

0.5%

Hexafluoro-1,3-butadiene(C4F6)

Purity

99.9% min

Moisture

10 ppm

AIR

500 ppm

other FC's

20 ppm

acidity

10 ppm

Sulfur Hexafluoride (SF6)

Purity

>99.999%

Moisture

5 ppm max

Acidity(as HF)

0.7 ppm max.

Air

10 ppm

Carbon Tetrafluoride (CF4)

5 ppm

Hydrolyzable Fluoride (as HF)

-

Mineral Oil

-

Toxicity

Non-toxic